Synthesis of PZT thin films by sol - gel process and its characterization

Ferroe lectri c Pb(Zr,Ti)O, (PZT) thin films ha ve been fa bri cated by the alkoxide based so l-ge l method. PZT stoc k so lutions ha ve been spin coated on glass. sili con and metalli sed sil ico n substrate. The coating is repeated until 0.6 ~lIn thick ness of film has been deposited on various substrates. PZT thin films have been an ne led at vari ous temperatures and characte rized by X-ray diffract ion and scanning electron mi croscope. Dielect ric constant and dielectric loss of PZT thin films has al so been measured at di fferent frequencies.